A highly selective room temperature ammonia sensor using spray deposited zinc oxide thin film

作者: Ganesh Kumar Mani , John Bosco Balaguru Rayappan

DOI: 10.1016/J.SNB.2013.03.132

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摘要: Abstract Nanostructured ZnO thin films were deposited on glass substrates at 503 K using spray pyrolysis technique and the post annealed 673 K in air atmosphere for 3 h. The structural, morphological optical properties of as-deposited samples investigated. showed uniform spherical morphology contrast with films. XRD patterns both confirmed polycrystalline nature hexagonal wurtzite structure. Room temperature ammonia sensing characteristics studied various concentration levels dry humidity conditions. A highest room response 233 was achieved 25 ppm NH3 a recovery times 20 25 s respectively. sensor to other gases such as methanol, ethanol, 2-propanol, benzyl alcohol acetone indicated high selectivity towards gas. (303 K) operation, selectivity, repeatability fast transition together low deposition cost suggests suitability developing power cost-effective sensor.

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