EUV-induced physico-chemical changes in near-surface layers of polymers
作者： A. Bartnik , H. Fiedorowicz , R. Jarocki , J. Kostecki , M. Szczurek
DOI: 10.1016/J.ELSPEC.2010.12.030
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摘要: Abstract In this work a laser-plasma EUV source based on gas puff target was used for micro- and nanostructuring of polyethylene terephthalate (PET), naphthalate (PEN) poly-oxydiphenylene-pyromellitimide (Kapton HN) foils. The plasma radiation focused using gold-plated grazing incidence ellipsoidal collector. collector allowed effective focusing Kr from the wavelength range λ = 9–70 nm. polymer foils were irradiated in focal plane or at some distance downstream surface morphology samples investigated scanning electron microscope (SEM) chemical changes by X-ray photoelectron spectroscopy (XPS). Different kinds nanostructures created near-surface layers polymers obtained. form structures depends type exposure. case PEN even single shot sufficient to obtain visible morphology. Kapton clearly modification requires tens pulses. To investigate structure XPS spectra, corresponding valence band samples, measured. Significant differences revealed spectra not-irradiated showing decrease functional groups containing oxygen indicated.
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