Substrate testing device and substrate testing method
作者： Hiroki Hatajima
DOI:
关键词:
摘要: In a substrate testing device, unit acquires tested result of by scanning an electron beam. An alignment mark detecting optically detects on the substrate. A position calculating calculates within device from mark. aligning aligns with calculated position.
lens.org 参考文章(4)
Peter Dirksen, Jan E. van der Werf, Manfred G. Tenner, Method of determining the radiation dose in a lithographic apparatus ,(1997)
Hideo Shinagawa, Kenichi Iwamoto, 稔也 島田, 憲市 岩本, Toshiya Shimada, 日出男 品川, Flat panel inspection device ,(1998)
Ahn Jong Nam, Kim Gwan Su, SYSTEM FOR INSPECTING GLASS ALIGNMENT ,(2001)
Jun Won Bae, Operation method of detecting device for liquid crystal substrates ,(2002)