Preferential sputtering of TiC and TiB2 coatings under D+ and 4He+ bombardment: Partial yields

摘要: The coating of first wall components in fusion devices with materials low to medium atomic number Z such as TiB2 and TiC, can help improve plasma impurity control reduce surface erosion. One the important tests coatings for applications deals measurements release by sputtering. In sputtering two component systems preferential emission one components, e.g., C, may occur. This paper reports experimentally determined partial yields B, Ti D+ 4He+ irradiations TiC energies ranging from 3 60 keV. were irradiated at ambient temperature normal incidence. Chemical vapor deposited on Poco graphite substrates have been studied surfaces which mechanically polished or left their as‐deposited state. equivalent thicknesses sputter deposits Rutherford backscattering technique. partia...