Preferential sputtering of TIC under keV Ar + ion bombardment: Simultaneous sputtering-ISS measurement with He + and Ar + ions
作者： H.J. Kang , Y. Matsuda , R. Shimizu
DOI: 10.1016/0167-2584(83)90693-X
关键词: Secondary ion mass spectrometry 、 Ion 、 Irradiation 、 Sputtering 、 Atom 、 Single crystal 、 Spectroscopy 、 Inorganic compound 、 Chemistry 、 Analytical chemistry
摘要: Abstract The composition change of the outermost atom layer TiC(110) under ion bombardment with 1.5–3 keV He+ and + Ar+ ions has been measured by scattering spectroscopy at different sample temperatures. It found that preferential sputtering C atoms takes place for both bombardment, however preferred is more pronounced than ions. elevated temperatures hardly results in any surface below ∼800°C, while enrichment as reported so far.
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