ISS measurement of surface composition of Au-Cu alloys by simultaneous ion bombardments with Ar+ and He+ ions
作者： Hee Jae Kang , R. Shimizu , T. Okutani
DOI: 10.1016/0167-2584(82)90364-4
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摘要: Abstract Surface composition of Au-Cu(43 at%) alloy under 1.5–5 keV argon ion bombardment has been investigated by scattering spectroscopy (ISS). In this experiment, we adopted a specific technique to use mixed He+ and Ar+ ions as primary beam in order perform sputtering (Ar+) ISS measurement (He+) simultaneously. The outermost atom layer Au-Cu alloys is Au-rich leading the conclusion that causes preferential Cu atoms, resulting depletion Au atoms beneath due ion-beam-enhanced surface segregation. This result explains experimental results obtained AES well.
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