Measurement of the band offsets between amorphous LaAlO3 and silicon

作者: L. F. Edge , D. G. Schlom , S. A. Chambers , E. Cicerrella , J. L. Freeouf

DOI: 10.1063/1.1644055

关键词:

摘要: The conduction and valence band offsets between amorphous LaAlO3 silicon have been determined from x-ray photoelectron spectroscopy measurements. These films, which are free of interfacial SiO2, were made by molecular-beam deposition. line-up is type I with measured 1.8±0.2 eV for electrons 3.2±0.1 holes. independent the doping concentration in substrate as well film thickness. films a bandgap 6.2±0.1 eV.

参考文章(16)
Anatoli Korkin, Jim Greer, Jan K. Labanowski, Nano and Giga Challenges in Microelectronics ,(2003)
Angus I. Kingon, Jon-Paul Maria, S. K. Streiffer, Alternative dielectrics to silicon dioxide for memory and logic devices Nature. ,vol. 406, pp. 1032- 1038 ,(2000) , 10.1038/35023243
Byung-Eun Park, Hiroshi Ishiwara, Electrical properties of LaAlO3/Si and Sr0.8Bi2.2Ta2O9/LaAlO3/Si structures Applied Physics Letters. ,vol. 79, pp. 806- 808 ,(2001) , 10.1063/1.1380246
Xu-bing Lu, Zhi-guo Liu, Yi-ping Wang, Ying Yang, Xiao-ping Wang, Hong-wei Zhou, Bich-yen Nguyen, Structure and dielectric properties of amorphous LaAlO3 and LaAlOxNy films as alternative gate dielectric materials Journal of Applied Physics. ,vol. 94, pp. 1229- 1234 ,(2003) , 10.1063/1.1586976
S. A. Chambers, Y. Liang, Z. Yu, R. Droopad, J. Ramdani, K. Eisenbeiser, Band discontinuities at epitaxial SrTiO3/Si(001) heterojunctions Applied Physics Letters. ,vol. 77, pp. 1662- 1664 ,(2000) , 10.1063/1.1310209
A. C. Tuan, T. C. Kaspar, T. Droubay, J. W. Rogers, S. A. Chambers, Band offsets for the epitaxial TiO2/SrTiO3/Si(001) system Applied Physics Letters. ,vol. 83, pp. 3734- 3736 ,(2003) , 10.1063/1.1625113
E. A. Kraut, R. W. Grant, J. R. Waldrop, S. P. Kowalczyk, Semiconductor core-level to valence-band maximum binding-energy differences: Precise determination by x-ray photoelectron spectroscopy Physical Review B. ,vol. 28, pp. 1965- 1977 ,(1983) , 10.1103/PHYSREVB.28.1965
P. W. Peacock, J. Robertson, Band offsets and Schottky barrier heights of high dielectric constant oxides Journal of Applied Physics. ,vol. 92, pp. 4712- 4721 ,(2002) , 10.1063/1.1506388
E. A. Kraut, R. W. Grant, J. R. Waldrop, S. P. Kowalczyk, Precise Determination of the Valence-Band Edge in X-Ray Photoemission Spectra: Application to Measurement of Semiconductor Interface Potentials Physical Review Letters. ,vol. 44, pp. 1620- 1623 ,(1980) , 10.1103/PHYSREVLETT.44.1620
E. T. Yu, E. T. Croke, T. C. McGill, R. H. Miles, Measurement of the valence‐band offset in strained Si/Ge (100) heterojunctions by x‐ray photoelectron spectroscopy Applied Physics Letters. ,vol. 56, pp. 569- 571 ,(1990) , 10.1063/1.102747