Silicon microtubes made by immersing macroporous silicon into ammonium fluoride solution
作者： Danilo Roque Huanca , Hae Yong Kim , Walter Jaimes Salcedo
DOI: 10.1016/J.MATCHEMPHYS.2015.03.032
关键词:
摘要: Abstract In this paper, we report the fabrication of silicon microtubes (SMT) by electrochemical dissolution macroporous layers immersed into aqueous solution NH4F mixed with Na2SO4, at different pH levels (4.5–9.5). Well-defined SMT have been obtained 6.5, 7.5 and 9.5, whereas for other levels, surface porous structure becomes passivated or formation needle-like occurs. The mean inner diameter thickness walls tubes shown to be depended on level solutions. investigation, from 0.2 2.0 μm wall about 0.23 0.50 μm. investigation these structures indicates that tube predominance anisotropic are necessary conditions. cannot explained regarding mechanism. For aim, role space charge region must regarded. structural characterization was achieved X-ray diffraction (XRD), energy dispersive Spectroscopy (EDS) Raman spectroscopy results pointed out constituted crystalline covered a very thin oxide film. mechanism is also discussed, highlighting (SCR) formation.
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