Media-compatible electrically isolated pressure sensor for high temperature applications

摘要: A method for manufacturing a Micro-Electro-Mechanical System pressure sensor. The includes forming gauge wafer including diaphragm and pedestal region. an electrical insulation layer disposed on second surface of the region plurality sensing elements patterned in cap with central recess inner through-wafer embedded vias made electrically conductive material wafer. creating sealed cavity by coupling recessed to wafer, such that connections from come out outer through vias. attaching spacer aperture aligned