Study on a Flexure Hinge-Based Micro-Displacement Platform
作者： Hua Wei Ji , Yong Qing Wen
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.179-180.1368
关键词:
摘要: In recent years, a flexure hinged micro-displacement platform driven by piezoelectric actuator is being widely used in vibration suppression and micro positioning applications for its fast response, nanometer resolution, no backlash, friction bigger driving force. This kind of precision system with high displacement resolution wide motion range has been required industrialized long time. paper discusses the design characteristics hinge-based actuator, four-bar parallel mechanism monolithic symmetrical are adopted design. An analytical model presented series formulae static behavior derived. Based on theoretical analysis, optimum schema put forward. The experimental demonstration to study performance described, method reducing nonlinearity errors proposed. results close agreement those predicted analysis.
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