作者: E. Arslan , F. Bülbül , I. Efeoglu
DOI: 10.1080/05698190490438987
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摘要: MoS 2 -Ti composite solid lubricant films were deposited on an AISI D2 tool steel and silicon wafer by CFUBMS (closed field unbalanced magnetron sputtering). The deposition process was performed for nine different test conditions at various levels of target current, working pressure, substrate voltage using the Taguchi L 9 (3 4 ) experimental method. It observed that chemical composition significantly affected sputtering parameters. determined microstructure is neither crystalline nor amorphous; in other words, it quasi-amorphous, (002) (100) planes characteristic occurred. friction coefficients over 1800 s a loading 10 N means pin-on-disk tribotester. changes coefficient related to structural based Ti addition