Tribological properties of sputtered MoS2 films in relation to film morphology
作者： Talivaldis Spalvins
DOI: 10.1016/0040-6090(80)90492-7
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摘要: Thin sputter-deposited MoS2 films in the thickness range 2000–6000 A have shown excellent lubricating properties when sputtering parameters and substrate conditions are properly selected precisely controlled. The of sputtered strongly influenced by their crystalline-amorphous structure, morphology composition. coefficient friction can from 0.04 which is effective lubrication to 0.4 reflects an absence properties. Visual screening slight wiping as-sputtered film determine integrity film. An acceptable displays a black sooty surface appearance whereas unacceptable has highly reflective gray hard brittle.
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M. T. Lavik, M. E. Campbell, Evidence of Crystal Structure in Some Sputtered MoS2 Films Tribology Transactions. ,vol. 15, pp. 233- 234 ,(1972) , 10.1080/05698197208981421
R.I. Christy, H.R. Ludwig, R.f. sputtered MoS2 parameter effects on wear life Thin Solid Films. ,vol. 64, pp. 223- 229 ,(1979) , 10.1016/0040-6090(79)90514-5
Talivaldis Spalvins, Lubrication with sputtered MoS2 films Tribology Transactions. ,vol. 14, pp. 267- 274 ,(1971) , 10.1080/05698197108983252
Talivaldis Spalvins, Structure of Sputtered Molybdenum Disulfide Films at Various Substrate Temperatures Tribology Transactions. ,vol. 17, pp. 1- 7 ,(1974) , 10.1080/05698197408981432