Nanomechanical Cantilever Array Sensors

作者: Hans Peter Lang , Martin Hegner , Christoph Gerber

DOI: 10.1007/978-3-642-02525-9_15

关键词:

摘要: In recent years, mechanics has experienced a revival, as microfabrication technologies and nanotechnology are applied to produce tiny structures. The development of ultraprecise position sensing started three decades ago with novel imaging technique called atomic force microscopy, which provides ultrahigh topography resolution on the scale by raster-scanning surface microfabricated cantilever beam that tip at its free end. high sensitivity can not only be used for imaging, but also allows measurement forces during molecule adsorption processes surface, thus enabling cantilevers act chemical sensors. Because their small size, allow fast reliable detection concentrations molecules in air solution. addition artificial nose label-free biosensing applications, they have been employed measure physical properties amounts materials miniaturized versions conventional standard techniques such calorimetry, thermogravimetry, weighing, photothermal spectroscopy monitoring reactions. past few cantilever-sensor concept extended medical applications entered clinics pilot studies patients. size scalability array sensors might turn out advantageous diagnostic screening disease monitoring, well genomics or proteomics. Using microcantilever arrays simultaneous several analytes solves inherent problem thermal drifts often present when using single sensors, some sensor detection, others passivated reference do show affinity detected.

参考文章(213)
Petr Skládal, Wolfgang Knoll, Roberto Raiteri, Hans-Jurgen Butt, Gabrielle Nelles, Sensing of biological substances based on the bending of microfabricated cantilevers Sensors and Actuators B-chemical. ,vol. 61, pp. 213- 217 ,(1999)
Mar Álvarez, Javier Tamayo, Optical sequential readout of microcantilever arrays for biological detection Sensors and Actuators B-chemical. ,vol. 106, pp. 687- 690 ,(2005) , 10.1016/J.SNB.2004.09.016
Guanghua Wu, Ram H. Datar, Karolyn M. Hansen, Thomas Thundat, Richard J. Cote, Arun Majumdar, Bioassay of prostate-specific antigen (PSA) using microcantilevers. Nature Biotechnology. ,vol. 19, pp. 856- 860 ,(2001) , 10.1038/NBT0901-856
Jr. Edward S. Kolesar, Electronic nerve agent detector ,(1983)
Ashwini R. Kadam, Gregory P. Nordin, Michael A. George, Comparison of microcantilever Hg sensing behavior with thermal higher order modes for as-deposited sputtered and thermally evaporated Au films Journal of Vacuum Science & Technology B. ,vol. 24, pp. 2271- 2275 ,(2006) , 10.1116/1.2345204
Yifei Zhang, Hai-Feng Ji, Gilbert M. Brown, Thomas Thundat, Detection of CrO42- Using a Hydrogel Swelling Microcantilever Sensor Analytical Chemistry. ,vol. 75, pp. 4773- 4777 ,(2003) , 10.1021/AC0343026
T. P. Burg, S. R. Manalis, suspended Microchannel Resonators for Biomolecular Detection Applied Physics Letters. ,vol. 83, pp. 2698- 2700 ,(2003) , 10.1063/1.1611625
Srinath Satyanarayana, Daniel T. McCormick, Arun Majumdar, Parylene micro membrane capacitive sensor array for chemical and biological sensing Sensors and Actuators B: Chemical. ,vol. 115, pp. 494- 502 ,(2006) , 10.1016/J.SNB.2005.10.013
F.M Battiston, J.-P Ramseyer, H.P Lang, M.K Baller, Ch Gerber, J.K Gimzewski, E Meyer, H.-J Güntherodt, A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout Sensors and Actuators B: Chemical. ,vol. 77, pp. 122- 131 ,(2001) , 10.1016/S0925-4005(01)00683-9
H. Ibach, Adsorbate‐induced surface stress Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 12, pp. 2240- 2245 ,(1994) , 10.1116/1.579122