Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers

摘要: We present a photocurable polymer composite with superparamagnetic characteristics for the fabrication of microcantilevers. Uniform distribution and low particle agglomeration (<50 nm) in matrix SU-8 are achieved by using nanoparticles surfactant. Particles characterized transmission electron microscope, UV-VIS spectrometer magnetic measurements. The contains 5 vol.% (18 wt.%) Fe3O4 diameters 12.1 ± 3.5 nm. exhibits magnetization saturation 13.2 kA m −1 . Superparamagnetic microcantilevers typical dimension 2 μm × 14 80‐300 successfully fabricated two conventional photolithography steps sacrificial layer etch. Exposure doses 10000 mJ cm −2 must be applied microcantilever thicknesses 1.8 due to high UV absorption particles composite. cantilevers actuated resonance air an amplitude 29 An off-chip coil is used generate field actuate cantilevers. (Some figures this article colour only electronic version)