Damping mechanisms of single-clamped and prestressed double-clamped resonant polymer microbeams
作者： S. Schmid , C. Hierold
DOI: 10.1063/1.3008032
关键词:
摘要: In this article, an investigation of the damping mechanisms resonant single- and double-clamped polymer microbeams for a frequency range from 10 kHz to 5 MHz is presented. The suspended structures are made SU-8, epoxy-type photoresist, by means sacrificial layer technique. vibration was measured with laser-Doppler vibrometer in high vacuum at different temperatures atmospheric pressure. influence air rarefied investigated intrinsic were determined (p<0.05 Pa). After excluding variety possible factors, dominant dissipation mechanism single-clamped understood be material maximum quality factors (Q) around 70 20 °C. Quality up 720 20 °C stringlike microbeams, which suggest than loss. It shown that internal due flexure a...
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(40)
Min-Hang Bao, Analysis and Design Principles of MEMS Devices ,(2005)
I. M. Ward, Mechanical properties of solid polymers ,(1971)
M. Calleja, J. Tamayo, A. Johansson, P. Rasmussen, L. M. Lechuga, A. Boisen, Polymeric cantilever arrays for biosensing applications Sensor Letters. ,vol. 1, pp. 20- 24 ,(2003) , 10.1166/SL.2003.010
Stephen P. Timoshenko, Vibration problems in engineering ,(1928)
J. Gaspar, V. Chu, J. P. Conde, Amorphous silicon electrostatic microresonators with high quality factors Applied Physics Letters. ,vol. 84, pp. 622- 624 ,(2004) , 10.1063/1.1644319
Silvan Schmid, Michael Wendlandt, David Junker, Christofer Hierold, Nonconductive polymer microresonators actuated by the Kelvin polarization force Applied Physics Letters. ,vol. 89, pp. 163506- ,(2006) , 10.1063/1.2362590
F.M Battiston, J.-P Ramseyer, H.P Lang, M.K Baller, Ch Gerber, J.K Gimzewski, E Meyer, H.-J Güntherodt, A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout Sensors and Actuators B: Chemical. ,vol. 77, pp. 122- 131 ,(2001) , 10.1016/S0925-4005(01)00683-9
G. Zhang, J. Gaspar, V. Chu, J. P. Conde, Electrostatically actuated polymer microresonators Applied Physics Letters. ,vol. 87, pp. 104104- ,(2005) , 10.1063/1.2040009
Minhang Bao, Heng Yang, Hao Yin, Yuancheng Sun, Energy transfer model for squeeze-film air damping in low vacuum Journal of Micromechanics and Microengineering. ,vol. 12, pp. 341- 346 ,(2002) , 10.1088/0960-1317/12/3/322
L. Heux, J.L. Halary, F. Lauprêtre, L. Monnerie, Dynamic mechanical and 13C n.m.r. investigations of molecular motions involved in the β relaxation of epoxy networks based on DGEBA and aliphatic amines Polymer. ,vol. 38, pp. 1767- 1778 ,(1997) , 10.1016/S0032-3861(96)00694-5