The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O3) oxidants
作者： J. Park , Tae-Hoon Jung , Jung-Hoon Lee , Hyun-Suk Kim , Jin-Seong Park
DOI: 10.1016/J.CERAMINT.2014.09.133
关键词:
摘要: … , where the oxidation of the zinc precursors occurs faster at … to have them react effectively with the zinc precursors [17]. The … decreased adsorption of the zinc precursor molecules, thus …
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