作者: Cheng Li , Xiangyang Gao , Shangchun Fan , Dongxue Wang , Wei Jin
DOI: 10.1109/JSEN.2016.2536783
关键词:
摘要: Van der Waals adhesion between graphene and substrate has an important impact on the graphene-based sensor performance. Here, we proposed a simple in situ measurement method for energy of diaphragm suspended endface ferrule. The interaction its created low finesse Fabry–Perot (FP) interferometer. analytical relationship prestress was modeled basis initial dip along edges regions. Then, deflection deformations pressurized were examined using FP interference technology. obtained energies monolayer two to five layer membranes SiO2 conformed exceedingly well previously measured results yielded cross-correlation coefficient 0.999 with latter. Furthermore, experimental setup acoustic pressure test developed determine $\sim 7$ -layer 13$ diaphragms zirconia be 0.286 0.275 J/ $\text{m}^{2}$ , respectively. highly consistent data confirmed accuracy our method. This presented this paper could further extended measuring other 2-D materials.