Diffractive optical element, method for manufacturing diffractive optical element, and laser beam machining method
作者： Jun Amako
DOI:
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摘要: A diffractive optical element includes: a substrate having first face and second face; structure section that is formed on the of substrate, shaped in rectangular form cross-sectional view section, an upper plurality protuberance portions; grid dielectric material, at least one including micro portions are smaller than each portions.
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