Kinetics of scanned probe oxidation: Space-charge limited growth
作者： Emmanuel Dubois , Jean-Luc Bubendorff
DOI: 10.1063/1.373510
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摘要: This article proposes an enhanced oxidation model for scanning probe microscope (SPM) nanolithography that reproduces the power-of-time law reported tip-induced anodic oxidation. It is shown space charge resulting from nonstoichiometric states strongly limits rate. The direct relationship between oxide thickness and time provided by integration of rate equation. Measurements on SPM-induced oxides generated a titanium surface are compared to theory. predominant role corroborated electrical measurements barriers exhibit current fluctuations due Coulombic effects.
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