Nonvolatile phase change memory nanocell fabrication by femtosecond laser writing assisted with near-field optical microscopy
作者： WJ Wang , R Zhao , LP Shi , XS Miao , PK Tan
DOI: 10.1063/1.2141649
关键词: Femtosecond 、 Materials science 、 Memory cell 、 Optics 、 Laser 、 Near-field optics 、 Phase-change memory 、 Nanolithography 、 Near-field scanning optical microscope 、 Nanocell
摘要: … nonvolatile, and requires no energy to keep the material … phase change between the amorphous state and the polycrystalline state is electrically induced in the phase change materials. …
core.ac.uk
harvard.edu
scitation.org
aip.org
sci-hub.se 参考文章(11)
D. Hulin, A. Rousse, C. Rischel, S. Fourmaux, I. Uschmann, S. Sebban, G. Grillon, Ph. Balcou, E. Förster, J.P. Geindre, P. Audebert, J.C. Gauthier, Non-thermal melting in semiconductors measured at femtosecond resolution Nature. ,vol. 410, pp. 65- 68 ,(2001) , 10.1038/35065045
Khalil Arshak, Miroslav Mihov, Declan McDonagh, David Sutton, Arous Arshak, Novel dry-developed focused ion beam lithography scheme for nanostructure applications Microelectronic Engineering. ,vol. 73, pp. 144- 151 ,(2004) , 10.1016/J.MEE.2004.02.031
Stanford R. Ovshinsky, Reversible Electrical Switching Phenomena in Disordered Structures Physical Review Letters. ,vol. 21, pp. 1450- 1453 ,(1968) , 10.1103/PHYSREVLETT.21.1450
Osamu Watanabe, Taiji Ikawa, Makoto Hasegawa, Masaaki Tsuchimori, Yoshimasa Kawata, Nanofabrication induced by near-field exposure from a nanosecond laser pulse Applied Physics Letters. ,vol. 79, pp. 1366- 1368 ,(2001) , 10.1063/1.1398326
Emmanuel Dubois, Jean-Luc Bubendorff, Kinetics of scanned probe oxidation: Space-charge limited growth Journal of Applied Physics. ,vol. 87, pp. 8148- 8154 ,(2000) , 10.1063/1.373510
Y. Lin, M.H. Hong, W.J. Wang, Y.Z. Law, T.C. Chong, Sub-30 nm lithography with near-field scanning optical microscope combined with femtosecond laser Applied Physics A. ,vol. 80, pp. 461- 465 ,(2005) , 10.1007/S00339-004-3093-0
E. Betzig, R. J. Chichester, Single molecules observed by near-field scanning optical microscopy. Science. ,vol. 262, pp. 1422- 1425 ,(1993) , 10.1126/SCIENCE.262.5138.1422
A. Pirovano, A.L. Lacaita, A. Benvenuti, F. Pellizzer, R. Bez, Electronic switching in phase-change memories IEEE Transactions on Electron Devices. ,vol. 51, pp. 452- 459 ,(2004) , 10.1109/TED.2003.823243
A. Pirovano, A.L. Lacaita, F. Pellizzer, S.A. Kostylev, A. Benvenuti, R. Bez, Low-field amorphous state resistance and threshold voltage drift in chalcogenide materials IEEE Transactions on Electron Devices. ,vol. 51, pp. 714- 719 ,(2004) , 10.1109/TED.2004.825805
D. Van Labeke, D. Barchiesi, F. Baida, Optical characterization of nanosources used in scanning near-field optical microscopy Journal of the Optical Society of America A. ,vol. 12, pp. 695- 703 ,(1995) , 10.1364/JOSAA.12.000695