Alloying process of sputter-deposited Ti/Ni multilayer thin films

作者: H. Cho , H.Y. Kim , S. Miyazaki

DOI: 10.1016/J.MSEA.2006.02.083

关键词:

摘要: … Furthermore, the Ti/Ni multilayer thin film composed of Ti and Ni layers can be fabricated by … multilayer thin film is estimated by the thicknesses of Ti and Ni layers. The thicknesses of Ti …

参考文章(22)
A.F Jankowski, M.A Wall, Transmission electron microscopy of Ni/Ti neutron mirrors Thin Solid Films. ,vol. 181, pp. 305- 312 ,(1989) , 10.1016/0040-6090(89)90498-7
Takahiro Sawaguchi, Morio Sato, Akira Ishida, Microstructure and shape memory behavior of Ti51.2(Pd27.0Ni21.8) and Ti49.5(Pd28.5Ni22.0) thin films Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 332, pp. 47- 55 ,(2002) , 10.1016/S0921-5093(01)01714-2
A. Ishida, A. Takei, S. Miyazaki, Shape memory thin film of TiNi formed by sputtering Thin Solid Films. ,vol. 228, pp. 210- 214 ,(1993) , 10.1016/0040-6090(93)90600-T
C. Sella, M. Maˆaza, M. Kaabouchi, S. El Monkade, M. Miloche, H. Lassri, Annealing effects on the structure and magnetic properties of Ni/Ti multilayers Journal of Magnetism and Magnetic Materials. ,vol. 121, pp. 201- 204 ,(1993) , 10.1016/0304-8853(93)91185-A
M. Kohl, K.D. Skrobanek, S. Miyazaki, Development of stress-optimised shape memory microvalves Sensors and Actuators A-physical. ,vol. 72, pp. 243- 250 ,(1999) , 10.1016/S0924-4247(98)00221-0
S. Miyazaki, T. Hashinaga, A. Ishida, Martensitic transformations in sputter-deposited Ti-Ni-Cu shape memory alloy thin films Thin Solid Films. pp. 364- 367 ,(1996) , 10.1016/0040-6090(96)08627-0
S Miyazaki, A Ishida, Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 273, pp. 106- 133 ,(1999) , 10.1016/S0921-5093(99)00292-0
Sohrab Sanjabi, Sayed K. Sadrnezhaad, Karen A. Yates, Zoe H. Barber, Growth and characterization of TixNi1−x shape memory thin films using simultaneous sputter deposition from separate elemental targets Thin Solid Films. ,vol. 491, pp. 190- 196 ,(2005) , 10.1016/J.TSF.2005.06.004