Structural properties of Cu2O epitaxial films grown on c-axis single crystal ZnO by magnetron sputtering
作者： S. Gorantla , H. N. Riise , Ø. S. Fjellvåg , S. Diplas , O. M. Løvvik
DOI: 10.1063/1.4945985
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摘要: Epitaxial Cu2O films grown by reactive and ceramic radio frequency magnetron sputtering on single crystalline ZnO (0001) substrates are investigated. The both O- Zn-polar surface of the substrates. exhibit a columnar growth manner apart from ∼5 nm thick CuO interfacial layer. In comparison to reactively sputtered Cu2O, ceramic-sputtered less strained appear contain nanovoids. Irrespective polarity, is observed have (111)Cu2O||(0001)ZnO epitaxial relationship, but in case found show additional (110)Cu2O reflections when O-polar surface. layer can be detrimental for performance Cu2O/ZnO heterojunction solar cells reported literature.
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