Influence of substrate temperature on structural, optical properties and dielectric results of nano- ZnO thin films prepared by Radio Frequency technique

作者: A.I. Ali , A.H. Ammar , A. Abdel Moez

DOI: 10.1016/J.SPMI.2013.11.007

关键词:

摘要: Abstract A Radio Frequency (RF) technique was used to prepare ZnO thin films with different substrate temperature under ultra high vacuum. Structure results revealed that these have crystalline structure. The structure of carried out using X-ray Diffraction and Atomic Force Electron Microscope (AFM). grain size for were determined AFM photos. optical parameters such as, energy gap, refractive index, extinction coefficient, dielectric loss tangent determined. Another important as dispersion energy, oscillating the ratio between free carrier concentration/effective mass (N/m*) optically. It found that, investigated plays an rule changing films.

参考文章(48)
A. H. Ammar, B. A. El-Sayed, E. A. El-Sayad, Structural and optical studies on ortho-hydroxy acetophenone azine thin films Journal of Materials Science. ,vol. 37, pp. 3255- 3260 ,(2002) , 10.1023/A:1016183017546
S. H. Wemple, M. DiDomenico, Optical Dispersion and the Structure of Solids Physical Review Letters. ,vol. 23, pp. 1156- 1160 ,(1969) , 10.1103/PHYSREVLETT.23.1156
HB Zhou, HY Zhang, ML Tan, ZG Wang, None, Effects of substrate temperature on the efficiency of hydrogen incorporation on the properties of Al-doped ZnO films Superlattices and Microstructures. ,vol. 51, pp. 644- 650 ,(2012) , 10.1016/J.SPMI.2012.03.003
Ji Wook Ryu, None, Dependence of Optical Anisotropy of ZnO Thin Filmson the Structural Properties Journal of the Korean Physical Society. ,vol. 57, pp. 389- 394 ,(2010) , 10.3938/JKPS.57.389
M. Fadel, S.A. Fayek, M.O. Abou-Helal, M.M. Ibrahim, A.M. Shakra, Structural and optical properties of SeGe and SeGeX (X = In, Sb and Bi) amorphous films Journal of Alloys and Compounds. ,vol. 485, pp. 604- 609 ,(2009) , 10.1016/J.JALLCOM.2009.06.057
J. W. Tomm, B. Ullrich, X. G. Qiu, Y. Segawa, A. Ohtomo, M. Kawasaki, H. Koinuma, Optical and photoelectrical properties of oriented ZnO films Journal of Applied Physics. ,vol. 87, pp. 1844- 1848 ,(2000) , 10.1063/1.372101
Weifeng Yang, Zhuguang Liu, Dong-Liang Peng, Feng Zhang, Huolin Huang, Yannan Xie, Zhengyun Wu, Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method Applied Surface Science. ,vol. 255, pp. 5669- 5673 ,(2009) , 10.1016/J.APSUSC.2008.12.021
Maria Elena Fragala, Graziella Malandrino, Characterization of ZnO and ZnO: Al films deposited by MOCVD on oriented and amorphous substrates Microelectronics Journal. ,vol. 40, pp. 381- 384 ,(2009) , 10.1016/J.MEJO.2008.09.003
E Marquez, AM Bernal-Oliva, JM Gonzalez-Leal, R Prieto-Alcon, A Ledesma, R Jimenez-Garay, I Martil, Optical-constant calculation of non-uniform thickness thin films of the Ge10As15Se75 chalcogenide glassy alloy in the sub-band-gap region (0.1-1.8 eV) Materials Chemistry and Physics. ,vol. 60, pp. 231- 239 ,(1999) , 10.1016/S0254-0584(99)00078-4