Effect of Process Gas Flow on the Coating Microstructure and Mechanical Properties of Vacuum Kinetic-Sprayed TiN Layers
作者： Fei Cao , Hyungkwon Park , Jeeae Heo , Juhyuk Kwon , Changhee Lee
DOI: 10.1007/S11666-013-9963-2
关键词:
摘要: TiN films were fabricated on glass substrate by a vacuum kinetic spray method to investigate the effect of process gas flow rate, which determines particle velocity, on coating …
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