Structures and methods for reducing polarization aberration in integrated circuit fabrication systems

摘要: An optical system includes multiple cubic crystalline elements and one or more uniaxial birefringent in which the crystal lattices of are oriented with respect to each other reduce effects intrinsic birefringence produce a reduced retardance. The net retardance is by cancellation contributions from element. may be used photolithography tool pattern substrates such as semiconductor thereby devices.