Microsystems and Smart Sensor Interfaces: A Review

作者: Franco Maloberti , Piero Malcovati

DOI: 10.1023/A:1008243412712

关键词:

摘要: Future integrated microsystems will benefit significantly from progress in the VLSI field. Two key elements boost implementation of new micro-integrated architectures: batch-manufactured silicon sensors and introduction circuit techniques for designing interface circuits. These two factors be essential favoring transition present ’’research driven speculations‘‘ to ’’customer activities‘‘. This paper discusses issues realizing microsensors most suitable interfacing processing their output signals. A number examples structures illustrate problems possible solutions.

参考文章(13)
Piero Malcovati, CMOS thermoelectric sensor interfaces Physical Electronics Laboratory, Swiss federal Institute of Technology (ETH). ,(1996) , 10.3929/ETHZ-A-001625830
P. Malcovati, A. Haberli, F. Mayer, O. Paul, F. Maloberti, H. Baltes, Combined air humidity and flow CMOS microsensor with on-chip 15 bit sigma-delta A/D interface symposium on vlsi circuits. pp. 45- 46 ,(1995) , 10.1109/VLSIC.1995.520681
Henry Baltes, CMOS as sensor technology Sensors and Actuators A: Physical. ,vol. 37-38, pp. 51- 56 ,(1993) , 10.1016/0924-4247(93)80011-5
C. Cornila, A. Hierlemann, R. Lenggenhager, P. Malcovati, H. Baltes, G. Noetzel, U. Weimar, W. Go¨pel, Capacitive sensors in CMOS technology with polymer coating Sensors and Actuators B-chemical. ,vol. 25, pp. 357- 361 ,(1995) , 10.1016/0925-4005(95)85080-5
Alvise Sartori, Franco Maloberti, Andrea Simoni, Guido Torelli, A 2D photosensor array with integrated charge amplifier Sensors and Actuators A-physical. ,vol. 46, pp. 247- 250 ,(1995) , 10.1016/0924-4247(94)00899-S
P. Malcovati, R. Castagnetti, F. Maloberti, H. Baltes, A magnetic sensor with current-controlled sensitivity and resolution Sensors and Actuators A-physical. ,vol. 46, pp. 284- 288 ,(1995) , 10.1016/0924-4247(94)00906-X
A. Haberli, M. Schneider, P. Malcovati, R. Castagnetti, F. Maloberti, H. Baltes, Two-dimensional magnetic microsensor with on-chip signal processing for contactless angle measurement IEEE Journal of Solid-state Circuits. ,vol. 31, pp. 1902- 1907 ,(1996) , 10.1109/4.545811
Oliver Paul, Henry Baltes, Novel fully CMOS-compatible vacuum sensor Sensors and Actuators A-physical. ,vol. 46, pp. 143- 146 ,(1995) , 10.1016/0924-4247(94)00878-L
T. Boltshauser, H. Baltes, Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimide Sensors and Actuators A-physical. ,vol. 26, pp. 509- 512 ,(1991) , 10.1016/0924-4247(91)87041-Z
A. Haberli, M. Schneider, P. Malcovati, R. Castagnetti, F. Maloberti, H. Baltes, 2D magnetic microsensor with on-chip signal processing for contactless angle measurement international solid-state circuits conference. pp. 332- 333 ,(1996) , 10.1109/ISSCC.1996.488641