作者: P. Malcovati , R. Castagnetti , F. Maloberti , H. Baltes
DOI: 10.1016/0924-4247(94)00906-X
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摘要: In this paper we present a novel split-current magnetic sensor (bulk Hall plate operated in the current mode) with on-chip circuitry, fabricated an industrial 2 μm CMOS process. The consists of low-doped resistive path one input and three output terminals. circuit controls biasing sensor, calculates difference between currents flowing through outer terminals provides voltage proportional to applied field. We demonstrate that sensitivity noise performance proposed device can be tuned by changing ratio bias central terminal, while keeping power consumption constant. Supporting numerical simulations based on finite-element method experimental results integrated prototype are reported as well.