SESES: a comprehensive MEMS modelling system
作者： J.G. Korvink , J. Funk , M. Roos , G. Wachutka , H. Baltes
DOI: 10.1109/MEMSYS.1994.555592
关键词:
摘要: We report recent advances made in building an integrated MEMS (Micro Electro Mechanical Systems) CAD, modelling system using the framework of SESES. It provides flexible coupling electrical, thermal and mechanical deformation phenomena a uniform consistent environment. The is tailored to specific requirements design. SESES achieves excellent computational accuracy efficiency on engineering workstations automatic mesh adaptation algorithm 2 3 dimensions super-fast linear solver. Near-optimal data structures enable meshes ca. 100 000 finite elements be solved workstation.
sci-hub.se 参考文章(1)
J.R. Gilbert, P.M. Osterberg, R.M. Harris, D.O. Ouma, X. Cai, A. Pfajfer, J. White, S.D. Senturia, Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions international conference on micro electro mechanical systems. pp. 207- 212 ,(1993) , 10.1109/MEMSYS.1993.296921