Apparatus and method for coating substrates using the eb/pvd process
作者： Johannes Schwagmann , Juergen Lemke , Joerg Wittich , Gerhard Schuhmann , Pavel Seserko
DOI:
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摘要: An apparatus for coating substrates using the EB/PVD process is described. In said apparatus, multiple crucibles (4) are arranged in a circle crucible head (3) that can be rotated about vertical axis. Each connected by means of single shaft (10) has lifting device form spindle drive (17). Said arrangement allows different materials to allocated individual such layers applied substrate, e.g. turbine blade, procedure successively rotating into an operating position (A) reached electrode beam. Since only one associated with each (4), assembly relatively compact. A dummy (6) center electron beam remain neutral while rotated.
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