Forming method of photoelectron readout part of ccd image sensor

摘要: PURPOSE: To restrain a CCD image sensor from deteriorating in blooming resistance and readout voltage so as to improve it electrical properties enhance wiring provided onto transfer electrode reliability by method wherein photoelectron read part is changed forming method. CONSTITUTION: A vertical register 12, gate 24, 17 of are formed on semiconductor substrate 11, section (e.g. photodiode) the upper layer 11 through ion implantation An mask 32 covering first process, then diffusion region (N + ) 20 photodiode 23 be connected 24 an oblique using second process. COPYRIGHT: (C)1993,JPO&Japio