Method of fabricating high efficiency binary planar optical elements

摘要: The high diffraction efficiency regime of binary gratings occurs at periodicities on the order a wavelength in to produce grating which diffract radiation with efficiencies greater than 90%, fabrication procedure is disclosed uses halographic and very large scale integration techniques allow fine control over periodicity depth parameters planar optical elements having ratio λ/T one (where λ equals an illuminating wavefront, T periodicity). Additionally, process produces quality diffractive phase precision as λ/100. These include laser beam multiplexers, profile shapers, lenses are lossless transfer functions.