Porous indium oxide thin films deposited by electrostatic spray deposition technique
作者： Camelia Matei Ghimbeu , Joop Schoonman , Martine Lumbreras
DOI: 10.1016/J.CERAMINT.2006.08.011
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摘要: This paper presents the preparation process of porous indium oxide (In2O3) films using a novel deposition technique, i.e., electrostatic spray (ESD). The were deposited on platinum-coated alumina substrates as precursor solution chloride in ethanol and acetic acid. characterized scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission (TEM) Raman spectroscopy. nanocrystalline structure was evidenced by TEM also XRD studies. spectroscopy measurements revealed cubic phase In2O3 films. Considering obtained results, we conclude that ESD technique is an efficient, cheap successful method for
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