High-resolution scanning transmission electron microscopy
作者： J. Liu , J.M. Cowley
DOI: 10.1016/0304-3991(93)90044-X
关键词:
摘要: Abstract High-resolution imaging in scanning transmission electron microscopy (STEM) instruments is achieved with a variety of detector configurations including bright-field/dark-field (BF/DF) by coherent phase contrast, high-angle annular dark-field (HAADF) incoherent atomic number contrast and many other modes. With the use post-specimen lenses to expand/compress whole diffraction pattern, collection angles both BF ADF can be varied continuously different may realized. Image resolution improved increasing angle detector. The large-angle bright-field (LABF) image reduced LABF images have less dependence on change beam defocus variations sample thickness. Applications these high-resolution STEM modes study interfaces are discussed.
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