Ultraviolet spectra of II–VI organometallic compounds and their application to in situ measurements of the photolysis in a metalorganic chemical vapor deposition reactor

作者: Y. Fujita , S. Fujii , T. Iuchi

DOI: 10.1116/1.576111

关键词:

摘要: The photoabsorption cross sections of Cd, Te, Zn, S, and Se alkyls have been measured at wavelengths between 190 400 nm, based on measurements UV absorption spectra. These spectra intense bands from to 250 nm. peak values these are 1–6×10−17 cm2 molecule−1. in situ photolysis achieved by monitoring a metalorganic chemical vapor deposition (MOCVD) reactor. results show that the can be quantitatively controlled varying laser power. As applications above studies, photoassisted MOCVD CdTe, HgTe, ZnS has demonstrated using ArF KrF excimer lasers. Specular surfaces were obtained growth temperatures 100 150 °C.

参考文章(0)