Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate
作者： Nan Wang , J.M. Tsai , B.W. Soon , Dim-Lee Kwong , Fu-Li Hsiao
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摘要: This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on two-dimensional (2-D) silicon phononic crystal (PnC) slab made etching square array cylindrical air holes in 10µm thick free-standing plate. Piezoelectric aluminum nitride (AlN) film is deployed as inter-digital transducers (IDT) to transmit detect acoustic waves, thus making whole microfabrication process CMOS-compatible. We also fabricate PnC structure which has stopband 140MHz < f <195MHz agrees quite well simulation results. The characterized resonant frequency microfabricated increases central-hole radius (r′) reaches its maximum value (163.54MHz) at r′=8µm, while Q factor (954) r′=6µm. based lattice show promising characteristics relative smaller active area than other reported designs. Such performance very for sensing applications.
sci-hub.se 参考文章(25)
Hongru Ma, Yongwei Gu, Xudong Luo, Low frequency elastic wave propagation in 2D locally resonant phononic crystal with asymmetric resonator arXiv: Materials Science. ,(2008) , 10.1063/1.3075820
Abdelkrim Khelif, Saeed Mohammadi, Ali Asghar Eftekhar, Ali Adibi, Boujamaa Aoubiza, Acoustic confinement and waveguiding with a line-defect structure in phononic crystal slabs Journal of Applied Physics. ,vol. 108, pp. 084515- ,(2010) , 10.1063/1.3500226
Vincent Laude, Younes Achaoui, Sarah Benchabane, Abdelkrim Khelif, Evanescent Bloch waves and the complex band structure of phononic crystals Physical Review B. ,vol. 80, pp. 092301- ,(2009) , 10.1103/PHYSREVB.80.092301
Saeed Mohammadi, Ali Asghar Eftekhar, William D. Hunt, Ali Adibi, High-Q micromechanical resonators in a two-dimensional phononic crystal slab Applied Physics Letters. ,vol. 94, pp. 051906- ,(2009) , 10.1063/1.3078284
M. F. Su, R. H. Olsson, Z. C. Leseman, I. El-Kady, Realization of a phononic crystal operating at gigahertz frequencies Applied Physics Letters. ,vol. 96, pp. 053111- ,(2010) , 10.1063/1.3280376
Tsung-Tsong Wu, Liang-Chen Wu, Zi-Gui Huang, Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers Journal of Applied Physics. ,vol. 97, pp. 094916- ,(2005) , 10.1063/1.1893209
Saeed Mohammadi, Ali Asghar Eftekhar, Abdelkrim Khelif, William D. Hunt, Ali Adibi, Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates Applied Physics Letters. ,vol. 92, pp. 221905- ,(2008) , 10.1063/1.2939097
Y. M. Soliman, M. F. Su, Z. C. Leseman, C. M. Reinke, I. El-Kady, R. H. Olsson, Phononic crystals operating in the gigahertz range with extremely wide band gaps Applied Physics Letters. ,vol. 97, pp. 193502- ,(2010) , 10.1063/1.3504701
S. Mohammadi, A.A. Eftekhar, A. Khelif, H. Moubchir, R. Westafer, W.D. Hunt, A. Adibi, Complete phononic bandgaps and bandgap maps in two-dimensional silicon phononic crystal plates Electronics Letters. ,vol. 43, pp. 898- 899 ,(2007) , 10.1049/EL:20071159
Roy H. Olsson, Ihab F. El-Kady, Mehmet F. Su, Melanie R. Tuck, James G. Fleming, Microfabricated VHF acoustic crystals and waveguides Sensors and Actuators A-physical. ,vol. 145, pp. 87- 93 ,(2008) , 10.1016/J.SNA.2007.10.081