Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solids
作者： O. Ellegaard , J. Schou , B. Stenum , H. Sørensen , R. Pedrys
DOI: 10.1016/0168-583X(92)95376-3
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摘要: Abstract The yields and energy distributions of particles sputtered from rare gas solids bombarded by keV ions have been studied. experimental are typically much larger than those predicted linear collision cascade theory, but the dependence on nuclear stopping power is similar. This discrepancy explained a sputtering model based nonoverlapping elastic subspikes. predictions this agree well with results for helium incident solid neon argon as nitrogen xenon. analysis regime demonstrates that subspikes do not overlap at primary energies considered.
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