Superconductivity of niobium thin films deposited by dc-diode sputtering

作者: J. Sosniak , G. W. Hull

DOI: 10.1063/1.1709136

关键词:

摘要: Niobium films with superconducting transition temperatures between 8.2° and 9.1°K have been deposited by dc diode sputtering. The results are shown to be due the reduction of film impurity content extensive presputtering high substrate temperatures.

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