Fundamental aspects and applications of electrochemical microfabrication
作者： M. Datta , D. Landolt
DOI: 10.1016/S0013-4686(00)00350-9
关键词:
摘要: … effective electrochemical microfabrication process requires careful design and fabrication of … the design and fabrication of precision electrochemical microfabrication tools. Commercially …
elsevier.com
sci-hub.se 参考文章(157)
N. Zech, E. J. Podlaha, D. Landolt, Rotating cylinder Hull cell study of anomalous codeposition of binary iron-group alloys Journal of Applied Electrochemistry. ,vol. 28, pp. 1251- 1260 ,(1998) , 10.1023/A:1003416328942
S. ROY, D. LANDOLT, Determination of the practical range of parameters during reverse-pulse current plating Journal of Applied Electrochemistry. ,vol. 27, pp. 299- 307 ,(1997) , 10.1023/A:1018480713718
E. Budevski, G. Staikov, W.J. Lorenz, Electrocrystallization: Nucleation and growth phenomena Electrochimica Acta. ,vol. 45, pp. 2559- 2574 ,(2000) , 10.1016/S0013-4686(00)00353-4
Q. CHEN, V. MODI, A. C. WEST, The influence of fluid flow on levelling performance Journal of Applied Electrochemistry. ,vol. 28, pp. 579- 587 ,(1998) , 10.1023/A:1003241917179
Sol Sherr, Robert C. Durbeck, Output Hardcopy Devices ,(1988)
Yasuhiro Fukunaka, Tetsuya Ōsaka, Noboru Masuko, New trends and approaches in electrochemical technology Kodansha , VCH. ,(1993)
C. P. Wong, Polymers for electronic and photonic applications Academic Press. ,(1993)
E. J. Podlaha, D. Landolt, Induced Codeposition: II. A Mathematical Model Describing the Electrodeposition of Ni‐Mo Alloys Journal of The Electrochemical Society. ,vol. 143, pp. 893- 899 ,(1996) , 10.1149/1.1836554
Roberto Vidal, Alan C. West, Copper Electropolishing in Concentrated Phosphoric Acid I . Experimental Findings Journal of The Electrochemical Society. ,vol. 142, pp. 2682- 2689 ,(1995) , 10.1149/1.2050074
Brett C. Baker, Alan C. West, Electrochemical Impedance Spectroscopy Study of Nickel‐Iron Deposition I. Experimental Results Journal of The Electrochemical Society. ,vol. 144, pp. 164- 169 ,(1997) , 10.1149/1.1837379