Characteristics of 1-MHz discharges in SF6/Ar and CF4/Ar mixtures in a parallel-plate system

摘要: In SF6/Ar and CF4/Ar mixtures at a total pressure of 0.5 Torr, the discharge characteristics 1-MHz have been investigated as function mixing ratio. case mixture, parameters, such discharge-sustaining voltage current, suddenly decrease by only 5% SF6 with Ar, plasma exists uniformly inside gap between electrodes. By increasing ratio, electron temperature rises, tends to saturate large ratios. density near axis is lower than that around edge electrode small CF4 At ratio 20%, in particular, interelectrode becomes very low, spatiotemporal emission profile across different from axis. ratios greater 60%, parameters change due electronegativity CF4. These are synergistic.