Integrated capacitively-coupled bias circuit for rf mems switches
作者： Francis J. Morris
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摘要: A switchable capacitor including a first electrode, dielectric layer on the second electrode configured to be suspended in an undeflected position over de-activated state, and deflect toward activated state response voltage difference between two electrodes, gap being less than corresponding having end, coupled one of electrodes at reduce as deflects wherein corresponds bias applied across end other electrodes.
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