INFLUENCE OF SUBSTRATE MATERIALS ON THE STRUCTURAL PROPERTIES OF ZNO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
作者： S Ahmad , ND Md Sin , Liyana Roslan , Hazriel Faizal Pahroraji , SK Alias
DOI: 10.11113/JT.V76.5650
关键词:
摘要: ZnO films were deposited on glass and SiO 2 /Si substrate by RF magnetron sputtering technique using high purity target at various power. The structural properties of thin film studied. the carried out surface profiler field emission scanning electron microscope (FESEM). It was found that average grain size increases with increasing power between 50-150 Watt gave lower which is desired for gas sensor applications.
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