Nano-parts fabrication method
作者： Jieran Li , Wen Lu , Yi Li
DOI:
关键词:
摘要: Embodiments of present invention provide a method forming nano-parts through vacuum coating technology. The includes creating set openings in substrate, the having shapes that are complimentary to and size between 1 nm 1000 nm; lining with thin layer oleic acid single molecule thickness; depositing metal-oxide material inside form nano-parts; immersing substrate together solution; applying supersonic vibration via solution causing detach from substrate; separating substrate.
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