Methods of forming nanoparticles using semiconductor manufacturing infrastructure
作者： Steven J. Holmes , Blake W. Davis , Alshakim Nelson , Joy Cheng , Daniel J. Coady
DOI:
关键词: Spin casting 、 Layer (electronics) 、 Nanoparticle 、 Molding (process) 、 Stripping (fiber) 、 Materials science 、 Engineering drawing 、 Substrate (printing) 、 Chemical engineering 、 Composite number 、 Photolithography
摘要: A method of preparing particles comprises forming by optical lithography a topographic template layer disposed on surface substrate, which is suitable for spin casting. The non-crosslinked polymer having pattern independent wells therein molding particles. Spin casting particle-forming composition onto the forms composite comprising and in wells. removed from substrate using stripping agent that dissolves without dissolving are then isolated.
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