Extending Microcontact Printing as a Microlithographic Technique
作者： Younan Xia , George M. Whitesides
DOI: 10.1021/LA960936E
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摘要: … of features of SAMs generated using microcontact printing. In combination with selective chemical etchings of coinage metals, SiO 2 , and Si, we could fabricate patterned microfeatures (…
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