Photopatternable Conductive PDMS Materials for Microfabrication

摘要: Conductive photodefinable polydimethylsiloxane (PDMS) composites that provide both high electrical conductivity and photopatternability have been developed. The photosensitive composite materials, which consist of a component, conductive filler, PDMS pre-polymer, can be used as negative photoresist or positive with an additional curing agent. A standard photolithographic approach has to fabricate elastomeric microstructures. Feature sizes 60 µm in the 10 µm successfully achieved. Moreover, silver powders significantly improve polymer, but also enhanced mechanical thermal properties well interesting biological properties. combined electrical, mechanical, thermal, along make PDMS-Ag excellent processable structural material for various microfabrication applications.