Precursor source mixtures

摘要: 6,067,244 A* 5/2000 Ma et al..................... 365/145 6,214,105 B1* 4/2001 Hintermaier etal... 106/287.19 is bound at least one ligand selected from the group con sisting of hydride, alkyl, alkenyl, cycloalkenyl, aryl, alkyne, carbonyl, amido, imido, hydraZido, phosphido, nitrosyl, nitryl, nitrate, nitrile, halide, aZide, alkoxy, siloxy, silyl, and halogenated, sulfonated or silyated derivatives thereof, Which is dissolved, emulsi? ed or suspended in an inert liquid selected from the group consisting of aliphatic hydrocar bons, aromatic hydrocarbons, alcohols, ethers, aldehydes, ketones, acids, phenols, esters, amines, alkylnitrile, haloge nated hydrocarbons, silyated hydrocarbons, thioethers, amines, cyanates, isocyanates, thiocyanates, silicone oils, nitroalkyl, alkylnitrate, and mixtures thereof. The precursor source mixture may be a solution, emulsion or suspension and may consist of a mixture of solid, liquid and gas phases Which …