摘要: Particulates called nanoparticles (principally having a diam eter of 10 nm or less) are reliably and easily according to size with high throughput. An impactor includes a particulate size classifying chamber provided with an exhaust port for par ticulates, a nozzle ejecting to the inside of the particulate size classifying chamber a carriergas containing particulates to be classified, and a trapping plate as particulate trapping unit provided in the particulate size classifying chamber and selectively trapping particulates ejected from the nozzle.