SIMULATION OF SI AND SIO2 FEATURE ETCHING IN FLUOROCARBON PLASMAS

GEORGE KOKKORIS , EVANGELOS GOGOLIDES , ANDREAS G. BOUDOUVIS
Papers Presented at MMN 2000 139 -142

2001
SIMULATION OF SI AND SIO₂ FEATURE ETCHING IN FLUOROCARBON PLASMAS

GEORGE KOKKORIS , EVANGELOS GOGOLIDES , ANDREAS G BOUDOUVIS
Microelectronics, Microsystems and Nanotechnology: Papers Presented at MMN 2000, Athens, Greece, 20-22 November 2000 139 -139

2001
Fabrication of a label-free micromechanical capacitive biosensor and integration with μPCR towards a LoC for disease diagnosis

Angeliki Tserepi , Stavros Chatzandroulis , George Kokkoris , Despina Moschou
16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 1804 -1806

2012
A hybrid modeling framework for the investigation of surface roughening of polymers during oxygen plasma etching

Elefterios Lidorikis , George Memos , Evangelos Gogolides , George Kokkoris
Journal of Physics D 54 ( 17) 175205

7
2021
Thorough computational analysis of the staggered herringbone micromixer reveals transport mechanisms and enables mixing efficiency-based improved design

Andreas G. Boudouvis , George Kokkoris , Andreas G. Hadjigeorgiou
Chemical Engineering Journal 414 128775

2021
Monte Carlo and Kinetic Monte Carlo Models for Deposition Processes: A Review of Recent Works

George Memos , Andreas G. Boudouvis , George Kokkoris , Nikolaos Cheimarios
Frontiers of Physics in China 9

10
2021
Simulation and Prediction of Aspect Ratio Dependent Phenomena during Si0 2 and Si Feature Etching in Fluorocarbon Plasmas

George Kokkoris , Evangelos Gogolides , G. Boudouvis Gogolides
Springer, Vienna 174 -177

2001
Integrated framework for the flux calculation of neutral species inside trenches and holes during plasma etching

George Kokkoris , Andreas G. Boudouvis , Evangelos Gogolides
Journal of Vacuum Science and Technology 24 ( 6) 2008 -2020

31
2006
All-plastic, low-power, disposable, continuous-flow PCR chip with integrated microheaters for rapid DNA amplification

Despina Moschou , Nikolaos Vourdas , George Kokkoris , George Papadakis
Sensors and Actuators B-chemical 199 470 -478

73
2014
Multiscale Computational Analysis of the Interaction between the Wafer Micro-Topography and the Film Growth Regimes in Chemical Vapor Deposition Processes

Nikolaos Cheimarios , George Kokkoris , Andreas G. Boudouvis
ECS Journal of Solid State Science and Technology 1 ( 4) 197

4
2012
A novel plasma fluid model for fast 2D calculations in capacitively coupled atmospheric pressure plasma jets

Sotiris Mouchtouris , George Kokkoris
Plasma Sources Science and Technology 30 ( 1)

2021
Comparison of continuous-flow and static-chamber μPCR devices through a computational study: the potential of flexible polymeric substrates

Vasileios E. Papadopoulos , George Kokkoris , Ioanna N. Kefala , Angeliki Tserepi
Microfluidics and Nanofluidics 19 ( 4) 867 -882

8
2015
A labyrinth split and merge micromixer for bioanalytical applications

Ioanna N. Kefala , Vasileios E. Papadopoulos , Georgia Karpou , George Kokkoris
Microfluidics and Nanofluidics 19 ( 5) 1047 -1059

15
2015
Is the resist sidewall after development isotropic or anisotropic? effects of resist sidewall morphology on LER reduction and transfer during etching

Vassilios Constantoudis , George Kokkoris , Evangelos Gogolides , Erwine Pargon
Advances in Resist Materials and Processing Technology XXVII 7639

6
2010
Linking the operating parameters of chemical vapor deposition reactors with film conformality and surface nano-morphology.

Nikolaos Cheimarios , Sokratis Garnelis , George Kokkoris , Andreas G. Boudouvis
Journal of Nanoscience and Nanotechnology 11 ( 9) 8132 -8137

8
2011
Plasma micro-nanotextured polymeric micromixer for DNA purification with high efficiency and dynamic range.

Athina S. Kastania , Katerina Tsougeni , George Papadakis , Electra Gizeli
Analytica Chimica Acta 942 58 -67

25
2016
Minimum energy paths of wetting transitions on grooved surfaces.

George Pashos , George Kokkoris , Andreas G. Boudouvis
Langmuir 31 ( 10) 3059 -3068

26
2015
Investigation of the kinetics of the chemical vapor deposition of aluminum from dimethylethylamine alane: experiments and computations

Ioannis G. Aviziotis , Thomas Duguet , Khaled Soussi , George Kokkoris
Physica Status Solidi (c) 12 ( 7) 923 -930

6
2015
Predicting the flow of cold plasma jets in kINPen: A critical evaluation of turbulent models

Dimitrios Passaras , Eleftherios Amanatides , George Kokkoris
Journal of Physics D 53 ( 26) 265202

2020
Ultrafast, low-power, PCB manufacturable, continuous-flow microdevice for DNA amplification.

Stavros Chatzandroulis , George Kokkoris , Angeliki Tserepi , Georgia D. Kaprou
Analytical and Bioanalytical Chemistry 411 ( 20) 5297 -5307

9
2019