Fabrication and characterization of high efficiency multilayer-coated blazed gratings for EUV range

Farhad Salmassi , Eric M Gullikson , Howard A Padmore , Ralf K Heilmann

2010
Ultra high density multilayer sliced grating for EUV and Soft X-rays: Recent Developments

Dmitriy L. Voronov , Eric M. Gullikson , Howard Padmore , Ralf Heilmann

2009
High efficiency blazed multilayer gratings for EUV and soft x-rays

Farhad Salmassi , Dmitriy Voronov , Eric Gullikson , Howard Padmore

2010
Directional Polarized Light Emission from Thin‐Film Light‐Emitting Diodes

Franky So , Nilesh Barange , Qi Dong , Xiangyu Fu
Advanced Materials 33 ( 9) 2006801

27
2021
Magnetically responsive polymer nanopillars with nickel cap.

Xu A Zhang , Chih-Hao Chang , Zhiren Luo
Nanotechnology 32 ( 20) 205301

2021
Large-Area Nanolattice Film with Enhanced Modulus, Hardness, and Energy Dissipation.

Christopher Bobko , Chih-Hao Chang , Abhijeet Bagal , Xu A. Zhang
Scientific Reports 7 ( 1) 9145 -9145

7
2017
Doppler writing and linewidth control for scanning beam interference lithography

Juan C. Montoya , Chih-Hao Chang , Ralf K. Heilmann , Mark L. Schattenburg
Journal of Vacuum Science & Technology B 23 ( 6) 2640 -2645

10
2005
Phase control in multiexposure spatial frequency multiplication

Yong Zhao , Chih-Hao Chang , Ralf K. Heilmann , Mark L. Schattenburg
Journal of Vacuum Science & Technology B 25 ( 6) 2439 -2443

5
2007
Spatial-frequency multiplication with multilevel interference lithography

Chih-Hao Chang , Y. Zhao , R. K. Heilmann , M. L. Schattenburg
Journal of Vacuum Science & Technology B 26 ( 6) 2135 -2138

2
2008
Wicking Enhancement in Three-Dimensional Hierarchical Nanostructures.

Zhiting Wang , Junjie Zhao , Abhijeet Bagal , Erinn C. Dandley
Langmuir 32 ( 32) 8029 -8033

50
2016
Three-dimensional colloidal interference lithography

Hironori Nagai , Austen Poteet , Xu A Zhang , Chih-Hao Chang
Nanotechnology 28 ( 12) 125302

3
2017
Twin photonic nanojets generated from coherent illumination of microscale sphere and cylinder.

Austen Poteet , Xu A Zhang , Hironori Nagai , Chih-Hao Chang
Nanotechnology 29 ( 7) 075204 -075204

16
2018
Evaluation of Photoacoustic Transduction Efficiency of Candle Soot Nanocomposite Transmitters

Wei-Yi Chang , Xu A. Zhang , Jinwook Kim , Wenbin Huang
IEEE Transactions on Nanotechnology 17 ( 5) 985 -993

32
2018
Describing isotropic and anisotropic out-of-plane deformations in thin cubic materials by use of Zernike polynomials.

Chih-Hao Chang , Mireille Akilian , Mark L. Schattenburg
Applied Optics 45 ( 3) 432 -437

4
2006
Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating

Michael P. Kowalski , Ralf K. Heilmann , Mark L. Schattenburg , Chih-Hao Chang
Applied Optics 45 ( 8) 1676 -1679

7
2006
Study on dielectric and piezoelectric properties of 0.7 Pb(Mg1/3Nb2/3)O3-0.3 PbTiO3 single crystal with nano-patterned composite electrode.

Wei-Yi Chang , Wenbin Huang , Abhijeet Bagal , Chih-Hao Chang
Journal of Applied Physics 114 ( 11) 114103 -114103

14
2013
High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

Dmitriy L. Voronov , Minseung Ahn , Erik H. Anderson , Rossana Cambie
Optics Letters 35 ( 15) 2615 -2617

41
2010
Nanostructured gradient-index antireflection diffractive optics.

Chih-Hao Chang , Jose A. Dominguez-Caballero , Hyungryul J. Choi , George Barbastathis
Optics Letters 36 ( 12) 2354 -2356

88
2011