Miguel Angel Gosalvez
机构: Ramón y Cajal Researcher, University of the Basque Country UPV/EHU
主页: ehu.es
每年引用次数
引用次数
引用: 2,143
H-指数: 26
I10-指数 : 50
出版物: 102
2013
First-principles calculations of Cu adsorption on an H-terminated Si surface
A. S. Foster , M. A. Gosálvez , T. Hynninen , R. M. Nieminen
Physical Review B 76 ( 7) 075315
20
2007
Relation between macroscopic and microscopic activation energies in nonequilibrium surface processing.
M. A. Gosálvez , R. M. Nieminen
Physical Review E 68 ( 3) 031604 -031604
5
2003
Exploring the activation energy during nanoscale structural evolution in wet etching
M.A. Gosalvez , K. Sato
international symposium on micro nanomechatronics and human science 127 -132
2004
Simulation of microloading and ARDE in DRIE
M.A. Gosalvez , Y. Zhou , Y. Zhang , G. Zhang
international conference on solid state sensors actuators and microsystems 1255 -1258
16
2015
Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching
M.A. Gosalvez , Yan Xing , K. Sato
IEEE\/ASME Journal of Microelectromechanical Systems 17 ( 2) 410 -431
46
2008
Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy
P. Pal , K. Sato , M.A. Gosalvez , Y. Kimura
IEEE\/ASME Journal of Microelectromechanical Systems 18 ( 6) 1345 -1356
51
2009
Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH
Bin Tang , Prem Pal , M.A. Gosalvez , M. Shikida
Sensors and Actuators A-physical 156 ( 2) 334 -341
39
2009
A Universal Parameter for Silicon Anisotropic Etching Inalkaline Solutions
D. Cheng , M.A. Gosalvez , M. Shikida , K. Sato
international conference on micro electro mechanical systems 318 -321
3
2006
An improved anisotropic wet etching process for the fabrication of silicon mems structures using a single etching mask
P. Pal , K. Sato , M.A. Gosalvez , M. Shikida
international conference on micro electro mechanical systems 327 -330
11
2008
Adsorbed surfactant thickness on: A Si wafer dominating etching properties of TMAH solution
Bin Tang , Miguel A Gosalvez , Prem Pal , Shintaro Itoh
international symposium on micro-nanomechatronics and human science 48 -52
2
2009
Anisotropic etching on Si{1?1?0}: experiment and simulation for the formation of microstructures with convex corners
Prem Pal , Miguel A Gosalvez , Kazuo Sato , H Hida
Journal of Micromechanics and Microengineering 24 ( 12) 125001
11
2014
Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants
Prem Pal , Kazuo Sato , Miguel A Gosalvez , Mitsuhiro Shikida
Journal of Micromechanics and Microengineering 17 ( 11) 2299 -2307
59
2007
Another approach to heterogeneous catalysis
Miguel A Gosalvez , Joseba Alberdi-Rodriguez
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 257
2019
Helium focused ion beam induced subsurface damage on Si and SiC substrates: Experiments and generative deep neural network modeling via position-dependent input
Qianhuang Chen , Miguel A Gosalvez , Qi Li , Yan Xing
Journal of Materials Research and Technology 24 3363 -3382
4
2023
Etch and growth rates of GaN for surface orientations in the< 0001> crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton
Xinyan Guo , Miguel A Gosalvez , Yan Xing , Ye Chen
Materials Science in Semiconductor Processing 153 107173 -107173
4
2023
Manufacture and Processing of MEMS Structures, Ch. 10
Miguel A Gosalvez
Elsevier, Micro and Nano Technologies series 157 -178
4
2010
VisualTAPAS: an example of density functional theory assisted understanding and simulation of anisotropic etching
Miguel A Gosalvez
Journal of Physics: Condensed Matter 20 ( 6) 064234 -064234
2
2008
Low coverage surface diffusion in complex energy landscapes: Analytical solution and application to intercalation in topological insulators
Miguel A Gosalvez , Mikhail M Otrokov , Nestor Ferrando , Anastasia G Ryabishchenkova
arXiv preprint arXiv:1402.5920
1
2014
Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching
Prem Pal , Kazuo Sato , Miguel A Gosalvez , Mitsuhiro Shikida
Micromachining and Microfabrication Process Technology XIII 6882 90 -97
1
2008